Microwave Discharges: Fundamentals and Applications
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- Artikel-Nr.: 10415847
Beschreibung
Surface Wave Discharges: Waves Propagation in Bounded Plasmas; C. Boisse-Laporte. Strongly Damped Surface Waves in Plasmas; G. Lister. Microwave Plasma Sources: Surface Wave Plasma Sources; Z. Zakrzewski, et al. ECR Plasma Sources; R. Wilhelm. Diagnostics: Optical Diagnostic for High Electron Density Plasmas; M. van de Sanden. Use of Emissive Probes in HF Plasmas; F.M. Dias. Modeling: Kinetic Modeling of Microwave Discharges; C.M. Ferreira. Time-Dependent EEDFs in Molecular Gases; M. Capitelli; et al. Light Sources: Applications of Microwave Discharges to High Power Light Sources; J. Waymouth. Applications: Semiconductor Processing Applications of Microwave Plasmas; J. Paraszczak, J. Heidenreich. Ion Bombardment Effects in Dual Microwave/Radio Frequency Plasmas; M. Wertheimer, L. Martinu. 24 additional articles. Index.
Eigenschaften
Gewicht: | 1311 g |
Höhe: | 254 |
Seiten: | 564 |
Sprachen: | Englisch |
Autor: | Carlos M. Ferreira, Michel Moisan |
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