Micromachined Mirrors

List of Figures. Acknowledgements. 1: Introduction. 1. Optical scanners. 2. Microelectromechanical systems (MEMS). 3. MEMS optical scanners. 4. Motivation. 5. Overview and organization. 2: Scanning Mirrors. 1. Mechanical dynamics. 2. Optics. 3. Summary of performance criteria. 3: Surface-Micromachined Mirrors. 1. Mirror design in MUMPS process. 2. Robustness and reliability. 3. Conclusions about surface-micromachined mirrors. 4: Staggered Torsional Electrostatic Combdrive (STEC) Micromirror. 1. STEC micromirrors. 2. Tensile optical surface mirrors. 5: Example Application of Scanning Mirrors. 1. Introduction. 2. Design and fabrication. 3. Video system. 4. Optical system. 5. Results. 6: Conclusions. 1. Scaling laws. 2. Fabrication technologies. 3. Future work. A: STEC Fabrication Process Flow. B: TOS Fabrication Process Flow. References.