A Practical Guide to Surface Metrology

Practical Guide to Surface Metrology Michael Quinten Preface 1 Introduction to Surfaces and Surface Metrology 1.1 Microscopic View on a Surface 1.2 Macroscopic View on a Surface 1.3 Measurement and Validation 1.4 The Way To Reliable Surface Data 2 Tactile Surface Metrology 2.1 Tactile Surface Profiling 2.2 Atomic Force Microscopy 3 Capacitive And Inductive Surface Metrology 3.1 Capacitive Surface Profiling 3.2 Surface Profiling With Eddy Currents 4 Optical Surface Metrology 4.1 Physical Basics 4.1.1 Electromagnetic waves 4.1.2 Huygens-Fresnel principle of wave propagation 4.1.3 Polarization 4.1.4 Interference 4.1.5 Coherence 4.1.6 Dielectric Function and Refractive Index 4.1.7 Reflection and Refraction 4.1.8 Dispersion Effects 4.1.9 Diffraction 4.1.10 Scattering 4.2 Chromatic Confocal Surface Profiling 4.3 Surface Profiling with an Autofocus Sensor 4.4 Light Sectional Methods 4.4.1 Triangulation 4.4.2 Line Projection 4.4.3 Fringe Projection 4.5 Microscopy Methods 4.5.1 Classical Microscopy 4.5.2 Confocal Microscopy 4.5.3 Focal Depth Variation 4.5.4 Scanning Near-Field Optical Microscopy 4.6 Interferometric Methods 4.6.1 Interferometric Form Inspection 4.6.1.1 Form inspection of planar surfaces 4.6.1.2 Form inspection of spherical, aspherical and freeform surfaces 4.6.2 Tilted Wave Interferometry 4.6.3 White Light Interferometry 4.6.4 Multi-Wavelength Interferometry 4.6.5 Grazing Incidence Interferometry 4.6.6 Digital Holographic Microscopy 4.6.7 Shearing Interferometry (Conoscopy) 4.7 Wave Front Sensing (Shack-Hartmann) 4.8 Deflectometry 4.9 Makyoh Topography Sensor 4.10 Surface Profiling Using Elastic Light Scattering 4.10.1 Total Integrated Scattering (TIS) 4.10.2 Angular Resolved Scattering (ARS) 4.10.3 Speckle Based Roughness Determination 4.11 Spectral Analysis and Characterization 4.11.1 Reflectometry 4.11.1.1 Optical Film Thickness Determination 4.11.1.2 Critical Dimensions Determination 4.11.2 Spectroscopic Ellipsometry 5 Imaging Methods 5.1 Classical Imaging 5.2 Spectral Imaging 5.3 Scanning Electron Microscopy 5.4 Optical Coherence Tomography 5.5 Terahertz Spectroscopy 6 Multisensor - Systems - A Versatile Approach To Surface Metrology 7 Appendices 7.1 Appendix A: Numerics With Complex Numbers 7.2 Appendix B: Levenberg-Marquardt Algorithm 8 References Index